Patents
Entegris technologies and products are protected by patents in the United States and elsewhere around the world. This listing is provided to satisfy the virtual patent marking provisions of various jurisdictions including 35 U.S.C. § 287(a) of the America Invents Act in the U.S.
Entegris products may not be all inclusive and other Entegris products not listed here may be protected by one or more patents. Certain of these patents may be available for licensing.
This listing is updated as patent information changes. Check back often for the latest information.
1010 Series EUV
Covered by or for use under U.S. Patents: 9,919,863; 8,231,005; 8,613,359; 7,328,727; 8,727,125. Additional patents may be pending in the U.S. and elsewhere.
BrightBlack®
Covered by or for use under U.S. Patents: 6,939,394; 6,743,278; 6,939,394 and 8,227,714. Additional patents may be pending in the U.S. and elsewhere.
BrightPak®
Covered by or for use under U.S. Patents: 9,067,718; 9,211,993 and D702,128. Additional patents may be pending in the U.S. and elsewhere.
FluoroPure®
Liquid DeliveryCovered by or for use under U.S. Patents: 7,806,151; 8,561,855; 7,760,104; 8,464,499; 9,505,603. Additional patents may be pending in the U.S. and elsewhere. Covered by or for use under U.S. Patents: 6,880,592. Additional patents may be pending in the U.S. and elsewhere.
FOUP including but not limited to A300 G3 and Spectra™
Covered by or for use under U.S. Patents: 6,880,718; 7,168,587; 6,848,578; 7,886,910; 8,276,759; 7,422,107; 6,712,213; 10,173,812; 10,723,525; 10,032,660; 10,347,517; 9,054,144; 9,312,157; 10,147,624; 7,219,802; 8,141,712; 6,749,067; 6,955,382; 6,644,477; 7,866,480; 7,201,276; 7,344,030; 7,182,203; 7,677,393; 7,100,772; 7,900,776; 7,578,407; 7,607,543; 7,523,830; 7,422,107; 10,043,696; 8,783463; D611,437; 9,054,144; 9,929,032; 9,9673,075; D668,865; D689,696; D740,031; 9,343,345; 9,633,877; 9,520,310; 9,997,388; 10,304,710; 10,734,264; 10,217,655; 10,872,795; 10,672,637; 11,398,395; 8,231,005; 9,745,119; 8,613,359. Additional patents may be pending in the U.S. and elsewhere.
NOWPak®
Covered by or for use under U.S. Patents: 5,875,921; 6,206,240; 6,942,123; 6,698,619; 7,025,234; 7,067,616; 7,172,096; 7,188,644 and 7,335,721. Additional patents may be pending in the U.S. and elsewhere.
NOWTrak®
Covered by or for use under U.S. Patents 6,879,876; 7,152,781; 7,370,791; 7,664,568; 7,702,418; 7,747,344; 8,150,549; 8,849,448 and 9,031,683. Additional patents may be pending in the U.S. and elsewhere.
Precursor Other
Covered by or for use under U.S. Patents 7,838,329; 8,008,117; 8,617,972 and 9,070,875. Additional patents may be pending in the U.S. and elsewhere.
SDS® 3
Covered by or for use under U.S. Patents: 6,743,278; 6,939,394 and 8,506,689. Additional patents may be pending in the U.S. and elsewhere.
VAC®
Covered by or for use under U.S. Patents: 7,328,716; 7,614,421; 7,943,204; 8,062,965; 8,138,071; 8,389,068; 8,598,022; 8,779,383 and 8,796,131. Additional patents may be pending in the U.S. and elsewhere.
Vaporizer
Covered by or for use under U.S. Patents: 6,921,062 and 8,821,640. Additional patents may be pending in the U.S. and elsewhere.
VaporSorb™
Covered by or for use under U.S. Patents: 7,922,791. Additional patents may be pending in the U.S. and elsewhere.