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Specialty Chemicals

Formulated chemistries and precursor materials for your most challenging process.

Expertly designed with customers' challenges in mind, Entegris tailors specially formulated chemistries and precursor materials to meet customers' technology and economic needs. We take pride in understanding customer specialty chemical requirements and applying our expertise in complex chemistry, efficiency in development and scale up capabilities, and high quality manufacturing for our customer’s success. We excel at determining synthesis routes quickly for potential solutions. We provide proactive supply chain management and excellence in process engineering. We have advanced quality and purity systems throughout our development and production.

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Post-CMP Cleaning Solutions

Application-specific solutions for post-CMP cleaning that provide excellent corrosion control, surface contamination removal, and cost of operational performance.

Post Etch Cleaning Solutions

Industry leading solutions for post etch processing needs
Precursors

We produce consistent and high-purity precursors for use in Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), and related technologies. Our portfolio includes complexes containing cyclopentadienyl, amide, alkoxide, carbonyl, acetylacetonate ligands, and many other metal-ligand complexes.
Wafer Reclaim

The RegenSi® family of solutions provides an all wet method for reclaiming or recycling used test wafers.  By removing dielectric and metal layers without the need for a subsequent CMP process, the RegenSi family increases the effective lifetime each test wafer - thereby reducing the customers test wafer spend.
Coating, Ink, and Adhesive Ingredients

High-performance, high-purity ingredients for your most challenging organic synthesis and chemical manufacturing processes.
Slurries

Our scalable portfolio includes high performance slurries that reduce COO and maintain low defectivity
Silanes

We excel in the development and manufacturing of high-quality silanes for a range of industrial and chemical processes.
Organophosphorus Compounds

We excel in the development and manufacturing of high-quality organophosphorus compounds for a wide range of applications from pharmaceuticals and industrial products to medical diagnostic reagents.

Specialty Acrylates and Methacrylates

Chemical building blocks used to make polymers for coatings and paints, sealants, adhesives, and inks. Their unique properties make them ideal for a variety of eye care, dentistry, and other biomedical applications as well.

Siloxanes

Used extensively in biomedical applications including eye and wound care medical devices. They are desirable as an intermediate or raw material in industrial applications including analytical R&D, coatings and adhesives, and chemical manufacturing.
Specialty Additives

We offer specialty additives used in coatings, inks, and adhesives including benzophenones, acetates, and sulfonic acid salts. Our organic offering includes materials used in photochromic and thermochromic dyes and inks.
Ligands

We offer Buchwald, chiral, phosphine, and additional ligands to support polymer manufacturing and small molecule pharmaceutical production.
Catalysts

Catalysts tailored to your polymer and small molecule drug manufacturing requirements and specifications
Electronic Chemicals

High-purity process chemicals for use in semiconductor and microelectronic manufacturing processes.