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Process Control

Reliable, linear proportional control and precise point-of-use blending and dispense in ultra high-purity and corrosive chemical environments.

Our industry proven InVue® integrated flow controllers combine differential pressure flow measurement technology and advanced closed-loop process control to enable precise point-of-use blending and dispense. Our portfolio of NT™ proportional control valves are compatible with highly corrosive processes and designed for use in CMP slurry and ultra high-purity applications.

Featured Information

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The Study of Effectiveness of Key Priming Cycles in IntelliGen® ULV
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Featured Information

download-pdf
The Study of Effectiveness of Key Priming Cycles in IntelliGen® ULV
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Featured Information

download-pdf
The Study of Effectiveness of Key Priming Cycles in IntelliGen® ULV
Download Now
Integrated Flow Controllers

Designed for point-of-use blending and dispense, Integrated Flow Controllers combine our proven and reliable, differential pressure flow measurement technology and advanced closed-loop process control. Available in low-to-medium, medium and medium-to-high flow ranges.
NT™ Proportional Control Valves

Our NT™ Proportional Control Valves are compatible with highly corrosive processes and designed for use in CMP slurry and ultra high-purity applications. With a range of flow factors from 0.16 to 10 Cv, we have a linear control valve to meet your flow control needs.
Photochemical Dispense Pumps

Learn how our two-stage dispense technology with a built-in Impact® 8G filter manifold enables independent filtration and dispense. Available for low-, medium- and high-viscosity fluids. Communication systems enable you to network your pumps for efficient process monitoring.