Reference Materials ( 2246 )
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Pictogram or InfographicPictorial of 3D NAND manufacturing challenges and Entegris solutions for overcoming them.
Ultraclean solvent purification with total metal removal performance
Ultraclean solvent purification with total metal removal performance
高純度ガス中の微粒子を非常に高い効率で除去できるニッケルメンブレンフィルター製のディフューザーです。 ロードロック室やトランスファ・チャンバー内に設置し、真空ブレークに用いるガス中の微粒子除去を行なうとともに、真空ブレーク時のガス流速を落すことで室内粒子の巻き上げを低減し、ウェーハへの粒子付着を防ぎます。
Our PrimeLock®, PFA tee union fittings are available in 1/4" to 40 mm sizes
Our PrimeLock®, PFA tee union fittings are available in 1/4" to 40 mm sizes
Our latest Corporate Social Responsibility report highlights the progress we are making in delivering impactful innovations for our customers that better our planet and communities.
The NCD-AA-AA dispense closure can be used with the NOWPak® Liner-based Bottle Systems or PDMPak® System for Pressurized Applications for filling, sealing, shipping, connecting, and dispensing chemical.
Reduce defect-causing impurities using high-performance, ultrapure and DI water filtration. These filters are suited for water filtration in semiconductor, hard disk drive manufacturing, flat panel display, and solar/photovoltaic industries.
Reliably control defect-causing contaminants in bulk ultrapure and DI water facility and point-of-tool applications with our Trinzik™ UPW T015 filters, designed for the highest-performance filtration.
Detailed instructions for repairing 1/2" manual Integra® 2-way, multi-turn valves.
Tools like the Entegris GV148 and SemiChem are used to continuously monitor H₂O₂ concentration, allowing for real-time adjustments to the slurry blend and ensuring that the process stays within the specified parameters.
Pre-cleaned, FEP diptube assembly for NOWPak Liner-based Canister Systems
인테그리스는 경기도 안산시에 12,000 m2 규모의 첨단 기술 센터를 개소함으로써, 한국 내 입지를강화하고 반도체 제조 분야의 혁신을 선도해 나가겠습니다.
New 12,000 square meter facility opens in Ansan, Gyeonggi-do, strengthening Entegris’ presence in Korea and advancing local innovation in semiconductor manufacturing.
Our Optimizer® ST3 filter manifold enables rapid filter changeouts without tools or chemical leakage, and is designed for use with Optimizer ST point-of-use liquid filters.
Cost-effective, clean inserts that can be safely transported by all automation systems
Explains how our AccuSizer® SIS syringe injection system is designed to meet and exceed all requirements in USP <787> Particulate Matter in Therapeutic Protein Injections test.
Safely protect and transport finished wafers in full, thin or ultra-thin thicknesses
Entegris is committed to corporate responsibility and respecting human rights in its operations and global supply chain.
Learn about this filter of choice for high-purity gas systems when all stainless steel construction is preferred. The all-metal construction is ideal for high-temperature and dynamic pressure applications.
The Mini DLS offers a flexible and elegant solution that can be adapted to a wide range of nanoparticle manufacturing processes including milling, homogenizing, or self-assembly.
Advanced dual-retention, liquid filtration for critical DHF/BOE cleaning applications
Learn how measuring gas or liquid pressure with NT™ Pressure Transducers allows you to monitor process conditions and increase safety and system performance. Designed for hydrofluoric acid and vacuum applications.
This manual is for use with NT® Pressure Transducers for vacuum applications, single-port and flowthrough models 4150 and 4250.
This paper introduces our latest innovative, dual-functional filtration technology for photoresist POU filtration, which provides superior performance with both sieving and nonsieving filtration mechanisms.
당사의 EDM 전극 소재는 금속 제거율, 낮은 전극 마모, 우수한 총소유비용을 최적의 균형으로 제공합니다.
Our EDM electrode materials offer the best balance of metal removal rates, low electrode wear, and excellent total cost of ownership.
The technical data detailed in this technical note focuses on validating the performance and reliability improvement of the SDS4 hydride cylinder package.
This study investigates the performance of a BF3 and B2F4 mixture on boron beam current and source lifetime.
The Solid Source Delivery Cabinet (SSDC) is a new line of solid chemical delivery equipment designed to meet the expanding needs of solid materials supply to process equipment beyond onboard containers.
For over 50 years, we have been committed to solving our customers' most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge. Read the facts here.
In this study, we demonstrate the significant role that filters play in reducing process downtime by achieving faster filter priming speeds and minimizing excursions under normal process conditions.
The H300 Single Wafer Shipper/Tray is designed to protect and transport 300 mm wafers during shipping or storage.
Comprehensive user guide for properly installing, operating, maintaining, and troubleshooting our InVue® GV148 liquid chemical concentration monitors.
Learn new particle characterization methods to detect coarse particles hiding in the tails of distributions. Runtime: 01:00:25.
Entegris' latest Probe Polish® materials deliver superior performance at higher temperatures, with improved resistance to fatigue and mechanical degradation.
For over 50 years, we have been committed to solving our customers' most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge. Read the facts here.
For over 50 years, we have been committed to solving our customers' most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge. Read the facts here.
For over 50 years, we have been committed to solving our customers' most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge. Read the facts here.
For over 50 years, we have been committed to solving our customers' most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge. Read the facts here.
For over 50 years, we have been committed to solving our customers' most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge. Read the facts here.
The purpose of this study was to provide an experimental and technical analysis of considerations that should be reviewed prior to selecting the hydrogen delivery method.
Contains detailed specifications and dimensions for our polypropylene (PP) bulk filter housing designed for use with our Panelgard Ex cartridge filters.
This study investigates two surface-modified ultra-high purity polyethylene (UPE) membranes, Functionalized UPE A and Functionalized UPE B, tailored for EUV Negative-Tone Development (NTD) CARs.
Entegris enables next-generation technologies with unparalleled expertise in complex chemistries.
Understand how different sterilizing grade gas/vent filters are used within bioprocessing process steps is the focus of this on-demand webinar, presented in partnership with Entegris and Bioprocess Online. Runtime: 43:16.
The Mini Dynamic Light Scattering (DLS) system measures the hydrodynamic size of particles ranging from 2 to 2000 nm in diameter.
Learn how utilizing advanced fluoropolymer materials in single-use systems offers distinct advantages in regards to extractables, chemical compatibility and cold temperature performance
随着更多生物药物的开发和产能提升，生产过程的过滤环节需要应对大量的、不同污堵特性的待过滤料液，比如抗体、ADC、重组蛋白、疫苗、细胞与基因治疗等工艺中所需的各种培养基、缓冲液、中间体溶液、半成品和成品等。
在制药和生物制药生产中，除菌级呼吸器和气体滤器至关重要，它们为工艺流体提供无菌保障，或确保工艺气体和排气经过必要的过滤。应特格是全球领先的颗粒和污染控制专家，在严格的半导体应用中，我们积累了丰富的材料科学专长和滤器制造经验，并开始将这些专长与经验应用到生命科学领域。
Cost-effective solution for clean, high-flow bulk chemical filtration
VCR® gasket replacement protects sensitive gas components
Comprehensive user guide for properly installing the Pharmsteri™ PES and PTFE cartridge filters. Includes product storage, installation, flushing and wetting, integrity testing, sterilization, operating, and cleaning instructions.
This paper examines a collaboration model and case studies to reduce defects while maintaining the composition of semiconductor manufacturing liquids, gases, and ambient air.
Entegris GPS8 auto regenerable bulk gas purifiers efficiently remove multiple impurities with high reliability, low cost, and high performance.
Pharmsteri™ II gamma-stable high flow (GHF) 0.22 µm PES capsule filters are designed and intended for critical, liquid filtration processing steps within pharmaceutical, biopharmaceutical, and medical applications.
Entegris purification systems provide the lowest TCO possible with longer intervals between regeneration cycles, lower regeneration temperatures, as well as innovative features such as a fully closed loop regeneration capabilities with zero hydrogen loss.
ND-CD series pressure dispense connectors provide a clean, convenient, and completely sealed method for dispensing chemicals from NOWPak® canisters.
Comprehensive user guide for properly installing, operating, and troubleshooting NT® Electronic Flowmeters, model 4400.
Learn how UN rated boxes help protect filled NOWPak liner-based system bottles when shipping hazardous chemicals.
A comprehensive guide for ordering NOWPak® liner based bottle systems. Includes detailed information on the system components and how they work together to deliver your materials with purity, safety, and process efficiency.
Simultaneously removes trace levels of positively charged ions and fine particles in ultrapure DI water
Advanced purifying filters providing superior metals and particle removal for critical clean IPA applications at the most demanding technology nodes
The ProE-Vap® 300 delivery system is designed for solid precursors used in Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) processes.
All-in-one purifier/filter devices that deliver ultimate protection from metal contamination in critical DI water cleaning applications at ambient and elevated temperatures
For use with inert and reactive gases including ozone, these filters provide superior particulate filtration in gas panels, gas cabinets, and anywhere ultrapure gas is required for wafer processing.