High Purity Chemical Manufacturing
Integrated circuit manufacturers are challenged with producing denser and more complex chips with smaller line spacing and 3D features.
The digital transformation we are all experiencing as consumers presents new challenges to material makers, as well as opportunities. Contamination control remains one of the largest challenge as integrated circuit (IC) technology advances. Better contamination control can significantly improve yield, and a one percent yield improvement can mean up to $150 million per year in net profit for the fab.
As a supplier to these fabs, the opportunities to enable these improvements exist in part within the purity of the materials.
Technical Paper
Performance Targets: Achieving Operational Excellence in Chemical Manufacturing by Optimizing Contamination Controls
Operational excellence (OE) is of upmost importance when manufacturing high-quality, semiconductor grade chemicals and their raw materials. Streamlining and expanding operations, improving quality, and maintaining differentiation are all key activities toward achieving OE. However, all these activities come at a cost, whether it be a financial impact or an impact on other opportunities. Filtration and purification of raw materials and chemicals can improve quality by reducing metals and particles, decreasing variability, and perhaps streamlining manufacturing processes.
White Paper
The Fight for Purity in Chemical Manufacturing
The digital transformation we are all experiencing as consumers present new challenges to material makers, as well as opportunities. Contamination control remains one of the largest challenges as integrated circuit (IC) technology advances. Better contamination control can significantly improve yield, and a one percent yield improvement can mean up to $150 million per year in net profit.
Featured Video
Runtime: 02:40
Developing a Holistic Filtration Solution to Increase Incoming Chemical Purity
Kusum Maharjan, Applications Manager, Wet Etch and Clean Engineering
Watch Kusum Maharjan, Entegris applications engineer, highlight the use of hybrid metrology to characterize the contaminants found ina recent study of hydrogen peroxide.
Pictogram
Becoming a Strategic Chemical Supplier: The Fight for Semiconductor Material Manufacturing Purity
Chemical manufacturers are critical determinants of quality and efficiency in the semiconductor fabrication process.
Blog
Safe, Clean Chemical Delivery
Purity requirements continue to tighten. This trend has been driven by market forces that include artificial intelligence, 5G, and big data. Maintaining purity is a primary challenge for chemical suppliers to the semiconductor industry. That’s because every step in the manufacturing process, including, storage, handling, filtering, and transport, has the potential to introduce contamination. When clean chemical delivery is paramount, choosing the right container is a crucial concern.
Video
Chemlock Manifold Introduction
Learn how the new Chemlock manifold technology is adding design flexibility, reducing downtime, and increasing operator safety to chemical filtration systems.
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These high-performance filters reliably control defect-causing contaminants in solvent and dilute acid and base applications. High-porosity, hydrophilic and hydrophobic PTFE membranes enables high flow rate and reduce operational costs in a variety of standard sizes and configurations.
Enables high flow rate and retention performance. Ultraclean technology effectively reduces metals, chlorides, and particle shedding to lower organic extractables to maximize wafer yield.
QuickChange filters provide advanced filtration of aqueous, outgassing, and aggressive acid and base chemistries in 28 nm or greater technology nodes. Enhanced cleaning technology effectively reduces metals, chlorides, and particle shedding to lower organic extractables to maximize wafer yield.
Purasol solvent purifiers are the best-in-class solutions for ultraclean chemical and raw material manufacturers. Using uniquely tailored membrane technology, the versatile purifier can efficiently remove both dissolved and colloidal metal contaminants from a wide variety of ultrapure, polar and non-polar solvents including difficult to remove ketones like cyclohexanone.
Best-in-class, clean, bulk photochemical filter, providing superior flow rate performance and excellent contaminant retention capabilities in sub 10 nm technology nodes.
Best-in-class, point-of-dispense slurry filter with ultra-high particle loading capacity in sub 45 nm technology nodes to prevent microscratches. Offers superior hard particle removal and gel retention performance at the point of dispense, reducing costly wafer defects.
Allows multiple bowl assemblies to occupy less space compared to the same number of individual Chemlock® PFA head/bowl assemblies. Available in 2-Up, 4-Up, or 6-Up configurations, in a series or parallel plumbing orientation, saving valuable space and adding process flexibility.
Our Chemlock® filter housing system saves space while ensuring safer installations and changeouts. Lock-in cartridge reduces required overall footprint and perfectly seats the cartridge in head with double O-ring engagement and straight alignment every time.
Rely on our FluoroPure HDPE blowmolded drums to maintain purity and safety when transporting large volumes of electronic-grade specialty chemicals. Our product portfolio of Advantage Trilayer and Trilayer drums has material options to meet all purity requirements around the globe. With higher purity, lower trace metals, and fewer particles compared to industry standard HDPE drums, our chemical packages help ensure clean chemical delivery.
To maintain a clean chemical environment, it is important to invest in chemical packaging and connection systems designed to work together to maintain chemical integrity. Our Sentry QCIII quick connection system is the cleanest, safest, and most user-friendly connection system available for bulk chemical dispense. Designed for use with FluoroPure chemical containers, this reliable means for filling containers or connecting a bulk chemical source to the chemical dispense unit remains the industry standard for high-purity chemical dispense.
Don’t risk contaminating your clean chemicals with dirty transport containers. Our FluoroPure IBCs provide a durable, high-purity alternative to easily corroded metal cages. Reusable 500, 800, and 1200 liter packages safely and efficiently transport chemicals in bulk, including chemicals with high vapor pressures.