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SEMICON West 2020
Pictorial of 3D NAND manufacturing challenges and Entegris solutions for overcoming them.
Our PrimeLock®, PFA tee union fittings are available in 1/4" to 40 mm sizes
Our PrimeLock®, PFA tee union fittings are available in 1/4" to 40 mm sizes
For over 50 years, we have been committed to solving our customers' most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge. Read the facts here.
For over 50 years, we have been committed to solving our customers' most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge. Read the facts here.
For over 50 years, we have been committed to solving our customers' most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge. Read the facts here.
Pharmsteri™ polypropylene cartridge filters provide economical filtration for removing particulate and colloidal contaminants in various pharmaceutical as well as food and beverage applications.
This manual covers the SemiChem Advanced Process Monitor (APM) 200, 3 Comp System, model AZC010353.
In this paper, we evaluate flow rate effects on the retention performance with several different levels of particle loading.
Comprehensive guide for properly installing our single and multi-round cartridge filter housings. Includes housing preparation, cartridge assembly, fitting inspection, and final assembly.
High-flow, polypropylene cartridge filters designed for flat panel display applications.
Reliably control defect-causing contaminants in bulk ultrapure and DI water facility and point-of-tool applications with our Trinzik™ UPW T015 filters, designed for the highest-performance filtration.
Made from a high-grade, gamma-stable fluoropolymer that maintains mechanical integrity in frozen applications to -85°C, our Aramus™ single-use 2D bag assemblies provide higher purity, greater compatibility, and increased safety for critical process fluids and final products.
This Field Service Manual is designed to enable the user to set up the system and perform initial operational checks.
This application note explores the growing purity needs in single-use systems used in pharmaceutical and biopharmaceutical industries, and analyzes particulate contamination levels in Aramus™ bag assemblies using the AccuSizer® SPOS system.
Comprehensive user guide for properly installing the Optimizer® ST3 filter manifold and attaching or removing the ST filter or flushing shell. Includes product specifications, dimensions, and safety instructions.
This validation guide addresses key requirements needed to validate Aramus™ bag assemblies for use in regulated applications. It contains sourcing, testing, and regulatory compliance summaries that validate Aramus bag assemblies meet those requirements.
This comprehensive user manual instructs users on properly unpacking, filling, freezing, storing, handling, and shipping Aramus™ standard bag subassemblies and full assemblies. Includes safety, warranty, and terms and conditions of sale.
Point-of-use all-polypropylene filters for pigment dispersed photoresist, acids, alkalis and pure water
The filter cup fits on NOWPak® ND-LD type dispense connector diptubes made of 3/8” outer diameter FEP or PFA tubing.
The Entegris centrifuge bioprocess bag is designed to provide a closed and sterile solution for cell harvest and separation, reducing the risks associated with open handling and cleaning.
This white paper spotlights Entegris’ proficiency and offerings in support of SiC wafer processing.
This installation and operating manual gives detailed instructions for properly installing, operating, and maintaining our SemiChem APMi 200, model 009350.
Fine particle count (FPC) reduction of slurries is an emerging field for CMP defect control. Fine particles in slurries may attach to wafer surfaces during polishing and lead to defects during thin film deposition.
This study demonstrates that filtration performance is influenced by multiple factors, including slurry chemistry, flow dynamics, and filter design.
Details specifications, performance data, and ordering information for our Panelgard™ EX cartridge filters, which are ideal for bulk filtration of solvents, dilute acids, and dilute bases in flat panel display applications.
Designed for bulk CMP filtration, the Planargard® NMP filter has an improved flow path with high retention that enhances yield in bulk chemical distribution systems at advanced nodes.
The CMP process usually includes mixing a fixed ratio and concentration of CMP slurry (including an abrasive), hydrogen peroxide (a strong oxidizing agent), and deionized water in a slurry blending station.
Sterile filtration is a critical final step in drug manufacturing, ensuring that liquid-based drug substances are free from microbial contaminants. In this webinar, discover how to design and implement Pre Use Post Sterilization Integrity Test (PUPSIT) assemblies to meet regulatory expectations and reduce operational risks. Runtime: 1:00.43.
高純度ガス中の微粒子を非常に高い効率で除去できるニッケルメンブレンフィルター製のディフューザーです。 ロードロック室やトランスファ・チャンバー内に設置し、真空ブレークに用いるガス中の微粒子除去を行なうとともに、真空ブレーク時のガス流速を落すことで室内粒子の巻き上げを低減し、ウェーハへの粒子付着を防ぎます。
All-in-one purifier/filter designed for use in critical DI water cleaning applications operating at high temperatures (up to 80°C)
All-in-one purifier/filter designed for use in critical DI water cleaning applications operating at high temperatures (up to 80°C)
High-efficiency solvent purifier/filter providing metals and particle removal at the device level in critical clean IPA applications
High-efficiency solvent purifier/filter providing metals and particle removal at the device level in critical clean IPA applications
Improve chemical cleanliness using high-flow solvent filtration in semiconductor, storage/hard disk drive, and flat panel display applications.
Rapid changeout and high performance for the most critical post CMP clean applications
Entegris is working with leading manufacturers to enable ongoing advancements in technology and supply our customers with premium products and solutions. Our global infrastructure includes strategically placed manufacturing sites, R&D facilities, and customer support centers. We make infrastructure investments that put us closer to our customers in all regions. Our highly skilled team members, facilities and resources are right where you need them in order to help you solve your most advanced technology challenges. Runtime: 01:29
Pharmsteri™ II 耐伽马辐照高通量GHC PES 系列囊式滤器专为化药、生物制药以及医疗应用中的关键液体过滤工序而设计。
Hydrophilic polysulfone membrane for point-of-use DI water and nonaggressive chemical filtration
High-flow polypropylene cartridge filters for flat panel display applications
Point-of-use purifiers, such as those in the Entegris Gatekeeper GPU product line, are designed and manufactured to meet the unique purification needs for hydrogen halides.
The solution for high-flow, high-purity gas filtration
The solution for high-flow, high-purity gas filtration
Point-of-tool, DI water filter with strong particle removal and flow rate performance
Point-of-tool, DI water filter with strong particle removal and flow rate performance
Ultraclean solvent purification with total metal removal performance
Ultraclean solvent purification with total metal removal performance
For more than five decades, we have been helping customers safeguard, automate, store, and ship a wide variety of small parts. Our custom packaging trays can be used anywhere and can be uniquely designed, created, and shipped within two weeks.
Our trays are used in a growing number of industries and environments to securely manage small parts inventory. This pictogram illustrates how easy it is to choose from our extensive library of more than 16,000 trays or customize them for virtually any small device.
SmartCap™ closures are used together with the NOWPak® liner-based bottle system and PDMPak® bottle system for pressurized applications to seal the bottles after they are filled with chemical.
