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SEMICON West 2020
Pictorial of 3D NAND manufacturing challenges and Entegris solutions for overcoming them.
Ultraclean solvent purification with total metal removal performance
Ultraclean solvent purification with total metal removal performance
高純度ガス中の微粒子を非常に高い効率で除去できるニッケルメンブレンフィルター製のディフューザーです。 ロードロック室やトランスファ・チャンバー内に設置し、真空ブレークに用いるガス中の微粒子除去を行なうとともに、真空ブレーク時のガス流速を落すことで室内粒子の巻き上げを低減し、ウェーハへの粒子付着を防ぎます。
Our PrimeLock®, PFA tee union fittings are available in 1/4" to 40 mm sizes
Our PrimeLock®, PFA tee union fittings are available in 1/4" to 40 mm sizes
Our latest Corporate Social Responsibility report highlights the progress we are making in delivering impactful innovations for our customers that better our planet and communities.
The NCD-AA-AA dispense closure can be used with the NOWPak® Liner-based Bottle Systems or PDMPak® System for Pressurized Applications for filling, sealing, shipping, connecting, and dispensing chemical.
Reduce defect-causing impurities using high-performance, ultrapure and DI water filtration. These filters are suited for water filtration in semiconductor, hard disk drive manufacturing, flat panel display, and solar/photovoltaic industries.
Reliably control defect-causing contaminants in bulk ultrapure and DI water facility and point-of-tool applications with our Trinzik™ UPW T015 filters, designed for the highest-performance filtration.
Detailed instructions for repairing 1/2" manual Integra® 2-way, multi-turn valves.
Tools like the Entegris GV148 and SemiChem are used to continuously monitor H₂O₂ concentration, allowing for real-time adjustments to the slurry blend and ensuring that the process stays within the specified parameters.
Pre-cleaned, FEP diptube assembly for NOWPak Liner-based Canister Systems
인테그리스는 경기도 안산시에 12,000 m2 규모의 첨단 기술 센터를 개소함으로써, 한국 내 입지를강화하고 반도체 제조 분야의 혁신을 선도해 나가겠습니다.
New 12,000 square meter facility opens in Ansan, Gyeonggi-do, strengthening Entegris’ presence in Korea and advancing local innovation in semiconductor manufacturing.
Our Optimizer® ST3 filter manifold enables rapid filter changeouts without tools or chemical leakage, and is designed for use with Optimizer ST point-of-use liquid filters.
Cost-effective, clean inserts that can be safely transported by all automation systems
Explains how our AccuSizer® SIS syringe injection system is designed to meet and exceed all requirements in USP <787> Particulate Matter in Therapeutic Protein Injections test.
Safely protect and transport finished wafers in full, thin or ultra-thin thicknesses
Entegris is committed to corporate responsibility and respecting human rights in its operations and global supply chain.
Learn about this filter of choice for high-purity gas systems when all stainless steel construction is preferred. The all-metal construction is ideal for high-temperature and dynamic pressure applications.
The Mini DLS offers a flexible and elegant solution that can be adapted to a wide range of nanoparticle manufacturing processes including milling, homogenizing, or self-assembly.
Advanced dual-retention, liquid filtration for critical DHF/BOE cleaning applications
Learn how measuring gas or liquid pressure with NT™ Pressure Transducers allows you to monitor process conditions and increase safety and system performance. Designed for hydrofluoric acid and vacuum applications.
This manual is for use with NT® Pressure Transducers for vacuum applications, single-port and flowthrough models 4150 and 4250.
This paper introduces our latest innovative, dual-functional filtration technology for photoresist POU filtration, which provides superior performance with both sieving and nonsieving filtration mechanisms.
당사의 EDM 전극 소재는 금속 제거율, 낮은 전극 마모, 우수한 총소유비용을 최적의 균형으로 제공합니다.
Our EDM electrode materials offer the best balance of metal removal rates, low electrode wear, and excellent total cost of ownership.
The technical data detailed in this technical note focuses on validating the performance and reliability improvement of the SDS4 hydride cylinder package.
This study investigates the performance of a BF3 and B2F4 mixture on boron beam current and source lifetime.
The Solid Source Delivery Cabinet (SSDC) is a new line of solid chemical delivery equipment designed to meet the expanding needs of solid materials supply to process equipment beyond onboard containers.
For over 50 years, we have been committed to solving our customers' most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge. Read the facts here.
In this study, we demonstrate the significant role that filters play in reducing process downtime by achieving faster filter priming speeds and minimizing excursions under normal process conditions.
The H300 Single Wafer Shipper/Tray is designed to protect and transport 300 mm wafers during shipping or storage.
Comprehensive user guide for properly installing, operating, maintaining, and troubleshooting our InVue® GV148 liquid chemical concentration monitors.
Learn new particle characterization methods to detect coarse particles hiding in the tails of distributions. Runtime: 01:00:25.
Entegris' latest Probe Polish® materials deliver superior performance at higher temperatures, with improved resistance to fatigue and mechanical degradation.